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Application
This product is all-metal welded structure, can choose semiconductor photovoltaic special pressure joint, liquid surface 100% special EP treatment, and degreasing oil free cleaning, fully meet the semiconductor, photovoltaic, flat panel display, high purity/ultra-pure environment, special gas pipeline and other applications.
● The pressure range covers -14.7~5000psi, and the range can be selected to meet the special requirements of customers.
● 100% leakage test of product production to meet the sealing requirements of the industry, to avoid the risk of flammable and explosive, corrosion or toxic media overflow.
The product is produced in a 100-level clean room and vacuum-packed while 100% cleaned to meet the requirements of SEMI standards.
Technical parameter
| Type | Gauge, Absolute, Negative Pressure |
| Measurement Range | -14.7…0…5000psi |
| Accuracy Grade (@25℃) | ≥160psi: ±0.1%FS BFSL; <160psi: ±0.15%FS BFSL |
| Maximum Measurement Deviation (@25℃) | ±0.25%FS |
| Overpressure | Up to 4 times maximum |
| Medium Temperature | -20…85°C |
| Ambient Temperature | -40…125°C |
| Average Temperature Coefficient (-20~85℃) | Zero point: <0.1%FS/10K; Span: <0.1%FS/10K |
| Supply Voltage | DC24V (10…30V DC) |
| Output Signal | 4…20mA, 0…5V, 0…10V, 1..5V |
| Connection Material | SUS316L/316L VIM/VAR |
| Diaphragm Material | SUS316L/316L VIM/VAR/V Nickel-based alloy |
| Stability Performance | Typical value: 0.1%FS/Year |
| Leak Rate | ≤ 1 × 10⁻¹⁰kPa. I/s |
| Packaging | Vacuum double-layer packaging, compliant with SEMI E49.6 |
Specification
Electrical connection
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